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Microsystems Technologies

Microsystems Technologies

Module Overview

The topic of microsystems is very wide-ranging.  A complete study of the subject requires us to extend our knowledge beyond electrical theory, into mechanics, chemistry, biochemistry and optics. The aim of the module is to tell you what a microsystem is and inform you of the most important techniques.

Note
This module used to include a unit on multi-chip modules (MCMs) and this was reflected in the title. The title was changed in February 2005 because the coverage of microsystems has been extended and the unit on MCMs has been dropped. An alternative brief description of multi-chip modules (MCMs) is to be found in unit 4 of the module Business Issues of Microelectronics.


Contents


Suggested Study Plan

Study Week Unit Unit / Assessment
1 1 Introduction to microsystems
2 2 Technologies & methodologies
3 3 Processing techniques - 1
4 4 Processing techniques - 2
5   Assignment 1, 15 hours (worth 30%)
6 5 Mechanical microsystems
7 6 & 7 Thermal and magnetic microsystems
Chemical and biological microsystems
8 8 Microsensor performance and arrays
9 9 Applications of microsystems
10 10 Design study: an accelerometer
11 & 12   Assignment 2, 35 hours (worth 70%)

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Tutor and Author Profiles

Roger Jackson - Tutor and author of Unit 10

Dr Jackson has been a tutor of under-graduate, post-graduate and research students at Bolton for almost twenty years having previously worked within the instrumentation and control division of ICI. His academic fields span instrumentation, control, electrical and electronic systems, signal processing and mathematical physics at both undergraduate and postgraduate levels. His research interests have included blood flow analysis, tomographic imaging of two-component flow in pipes and the onset of ignition within the chamber of a petrol engine.

His consultancy work includes tomographic imaging of wind-tunnel data for British Aerospace and the development of a new inductance sensor for on-line, non-contact thickness measurement of conducting films.

He has published extensively and regularly referees books, papers and research proposals for EPSRC and other funding bodies. He has contributed to a book on the industrial applications of tomography and his most recent book, Novel Sensors and Sensing (listed below), describes recent advances in the development of sensors and sensor signal processing methods.

 

Clive Robinson - Author of units 1 - 9

Clive Robinson's career has focused on ASICs, quality systems and microsystems. After graduating he joined the Space Systems Group in Ferranti where he became responsible for the design reliability of satellite navigation systems. Clive then moved to a design consultancy in Edinburgh where he worked with a range of technologies, including full custom ASICs and sensors. As well as design he was responsible for subcontracted fabrication, assembly and test. In 1991 Clive set up a consultancy to help companies benefit from microelectronics. A few years later the UK Government adopted many of the ideas into the Microelectronics in Business programme and appointed Clive as a Business Advisor covering Scotland and Northern Ireland. He has been involved in several projects using microsystems and multichip modules. Clive is the author of several papers on both the technical and commercial aspects of microelectronics. He has worked on standards bodies trying to harmonise the ASIC design process and is on the EC's list of experts for work in technology transfer involving ASICs. He is a founder member of the UK's Semiconductor Business Association and has established benchmarking guidelines for the members.

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Recommended Textbooks

Title Author ISBN Publisher
Microsensors: Principles and Applications J W Gardner 0-471-94136-0 John Wiley & Sons Ltd. Out of print but copies stocked by the library.
Microsensors, MEMS and Smart Devices J W Gardner, V K Varandan, O O Awadelkarim 0-4718-6109X John Wiley & Sons Ltd
RF MEMS and their Applications V K Varadan, K J Vinoy, K A Jose 0-4708-4308X, also available as an ebook John Wiley and Sons Ltd
Novel Sensors and Sensing
R G Jackson 0-7503-0989X
Institute of Physics Publishing Ltd

The CET Postgraduate Programmes Office will post you a copy of each of these DTI publications:

Title Date
Microsystems Technology - An Introduction 2002
Microsystem Solutions 1998

 

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31.10.05 RA

 

 

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