Microsystems Technologies
Module Overview
The topic of microsystems is very wide-ranging. A complete
study of the subject requires us to extend our knowledge beyond electrical
theory, into mechanics, chemistry, biochemistry and optics. The aim of the
module is to tell you what a microsystem is and inform you of the most important
techniques.
Note
This module used to include a unit on multi-chip modules (MCMs)
and this was reflected in the title. The title was changed in February 2005
because the coverage of microsystems has been extended and the unit on MCMs
has been dropped. An alternative brief description of multi-chip modules (MCMs)
is to be found in unit 4 of the module Business
Issues of Microelectronics.
Contents
Suggested Study Plan
| Study Week
| Unit
| Unit / Assessment |
| 1 |
1 |
Introduction to microsystems |
| 2 |
2 |
Technologies & methodologies |
| 3 |
3 |
Processing techniques - 1 |
| 4 |
4 |
Processing techniques - 2 |
| 5 |
|
Assignment 1, 15 hours (worth 30%) |
| 6 |
5 |
Mechanical microsystems |
| 7 |
6 & 7 |
Thermal and magnetic microsystems
Chemical and biological microsystems |
| 8 |
8 |
Microsensor performance and arrays |
| 9 |
9 |
Applications of microsystems |
| 10 |
10 |
Design study: an accelerometer |
| 11 & 12 |
|
Assignment 2, 35 hours (worth 70%) |
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Tutor and Author Profiles
| Roger Jackson - Tutor and author of Unit 10 |
 |
Dr Jackson has been a tutor of under-graduate, post-graduate and research students at Bolton for almost twenty years having
previously worked within the instrumentation and control division
of ICI. His academic fields span instrumentation, control, electrical
and electronic systems, signal processing and mathematical physics
at both undergraduate and postgraduate levels. His research interests
have included blood flow analysis, tomographic imaging of two-component
flow in pipes and the onset of ignition within the chamber of a petrol
engine.
His consultancy work includes tomographic imaging of wind-tunnel
data for British Aerospace and the development of a new inductance
sensor for on-line, non-contact thickness measurement of conducting films.
He has published extensively and regularly referees books, papers
and research proposals for EPSRC and other funding bodies. He has
contributed to a book on the industrial applications of tomography
and his most recent book, Novel Sensors and Sensing (listed
below), describes recent advances in the development of sensors and
sensor signal processing methods.
|
| Clive Robinson - Author of units 1 - 9
|
 |
Clive Robinson's career has focused on ASICs, quality systems and
microsystems. After graduating he joined the Space Systems Group in
Ferranti where he became responsible for the design reliability of satellite
navigation systems. Clive then moved to a design consultancy in Edinburgh
where he worked with a range of technologies, including full custom
ASICs and sensors. As well as design he was responsible for subcontracted
fabrication, assembly and test. In 1991 Clive set up a consultancy to
help companies benefit from microelectronics. A few years later the
UK Government adopted many of the ideas into the Microelectronics in
Business programme and appointed Clive as a Business Advisor covering
Scotland and Northern Ireland. He has been involved in several projects
using microsystems and multichip modules. Clive is the author of several
papers on both the technical and commercial aspects of microelectronics.
He has worked on standards bodies trying to harmonise the ASIC design
process and is on the EC's list of experts for work in technology transfer
involving ASICs. He is a founder member of the UK's Semiconductor Business
Association and has established benchmarking guidelines for the members.
|
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Recommended Textbooks
| Title |
Author |
ISBN |
Publisher |
| Microsensors: Principles and Applications |
J W Gardner |
0-471-94136-0 |
John Wiley & Sons Ltd. Out of print but copies stocked by the
library. |
| Microsensors, MEMS and Smart Devices |
J W Gardner, V K Varandan, O O Awadelkarim |
0-4718-6109X |
John Wiley & Sons Ltd |
| RF MEMS and their Applications |
V K Varadan, K J Vinoy, K A Jose |
0-4708-4308X, also available as an ebook |
John Wiley and Sons Ltd |
Novel Sensors and Sensing |
R G Jackson |
0-7503-0989X |
Institute of Physics Publishing Ltd |
The CET Postgraduate Programmes Office will post you a copy of each of
these DTI publications:
| Title |
Date |
| Microsystems Technology - An Introduction |
2002 |
| Microsystem Solutions |
1998 |
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31.10.05 RA